This paper presents the design, fabrication, and electrical characterization of an\nelectrostatically actuated and capacitive sensed...plate resonator structure that exhibits a\npredicted mass sensitivity of.... The resonator is embedded in a fully on-chip\nPierce oscillator scheme, thus obtaining a quasi-digital output sensor with a short-term frequency\nstability of....(...) n air conditions, corresponding to an equivalent mass noise floor as\nlow as.... The monolithic CMOS-MEMS sensor device is fabricated using a commercial..... metal complementary metal-oxide-semiconductor (CMOS) process, thus featuring\nlow cost, batch production, fast turnaround time, and an easy platform for prototyping distributed\nmass sensors with unprecedented mass resolution for this kind of devices.
Loading....